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Superconducting qubits are coherence-limited by materials losses, but the lack of comparable interlaboratory metrics is stunting progress towards lower loss devices. Here, we compile resonator loss measurements from literature and attempt to compare them by scaling loss by the gap of the coplanar waveguide resonator to account for participation of the lossy material. This resource is intended for use by researchers interested in building higher performance materials stacks for superconducting quantum devices. This resource is based on information originally collected for:
C. R. H. McRae, H. Wang, J. Gao, M. Vissers, T. Brecht, A. Dunsworth, D. Pappas, and J. Mutus, Materials Loss Measurements Using Superconducting Microwave Resonators, 091101, (2020). View Reference
Background diagonal lines represent constant interface losses with varying geometry while accounting for the filling factor of the TLS-ridden materials.
# References * * *
Calusine, G., Melville, A., Woods, W., Das, R., Stull, C., Bolkhovsky, V., Braje, D., Hover, D., Kim, D. K., Miloshi, X. et al., "*Analysis and mitigation of interface losses in trenched superconducting coplanar waveguide resonators*" Appl. Phys. Lett. **112**, 062601 (2018). View Reference .
De Graaf, S., Faoro, L., Burnett, J., Adamyan, A., Tzalenchuk, A. Y., Kubatkin, S., Lindström, T., and Danilov, A., “Suppression of low-frequency charge noise in superconducting resonators by surface spin desorption”, Nat. Commun. 9, 1143 (2018). View Reference .
Earnest, C. T., Béjanin, J. H., McConkey, T. G., Peters, E. A., Korinek, A., Yuan, H., and Mariantoni, M., “Substrate surface engineering for high-quality silicon/aluminium superconducting resonators,” Supercond. Sci. Technol. 31, 125013 (2018). View Reference .
Gao, R., Yu, W., Deng, H., Ku, H.-S., Zhisheng, L., Wang, M., Miao, X., Lin, Y., & Deng, C. (2022). "Epitaxial titanium nitride microwave resonators: Structural, chemical, electrical, and microwave properties," 6(3). View Reference .
Goetz, J., Deppe, F., Haeberlein, M., Wulschner, F., Zollitsch, C. W., Meier, S., Fischer, M., Eder, P., Xie, E., Fedorov, K. G. et al., “Loss mechanisms in superconducting thin film microwave resonators,” J. Appl. Phys. 119, 015304 (2016). View Reference.
Kowsari, D., K. Zheng, J. T. Monroe, N. J. Thobaben, X. Du, P. M. Harrington, E. A. Henriksen, D. S. Wisbey, K. W. Murch; "Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators," Appl. Phys. Lett. 27 , September 2021; 119 (13): 132601. View Reference .
Kumar, S., Gao, J., Zmuidzinas, J., Mazin, B. A., LeDuc, H. G., and Day, P. K., “Temperature dependence of the frequency and noise of superconducting coplanar waveguide resonators,” Appl. Phys. Lett. 92(12), 123503 (2008). View Reference .
Lock, E. H., Xu, P., Kohler, T., Camacho, L., Prestigiacomo, J., Rosen, Y. J., and Osborn, K. D., “Using surface engineering to modulate superconducting coplanar microwave resonator performance,” IEEE Trans. Appl. Supercond. 29, 1700108 (2019). View Reference .
Lozano, D. P., M. Mongillo , X. Piao , S. Couet , D. Wan , Y. Canvel , A. M. Vadiraj , Ts. Ivanov, J. Verjauw, R. Acharya, J. Van Damme, F. A. Mohiyaddin, J. Jussot, P. P. Gowda, A. Pacco, B. Raes, J. Van de Vondel, I. P. Radu, B. Govoreanu1 J. Swerts, A. Potočnik, and K. De Greve, “Manufacturing high-Q superconducting α-tantalum resonators on silicon wafers”, (2023) View Reference .
Macha, P., van Der Ploeg, S. H. W., Oelsner, G., Il’ichev, E., Meyer, H.-G., Wünsch, S., and Siegel, M., “Losses in coplanar waveguide resonators at millikelvin temperatures,” Appl. Phys. Lett. 96(6), 062503 (2010). View Reference .
McRae, C. R. H., Béjanin, J. H., Earnest, C. T., McConkey, T. G., Rinehart, J. R., Deimert, C., Thomas, J. P., Wasilewski, Z. R., and Mariantoni, M., “Thin film metrology and microwave loss characterization of indium and aluminum/indium superconducting planar resonators,” J. Appl. Phys. 123(20), 205304 (2018). View Reference .
Megrant, A., Neill, C., Barends, R., Chiaro, B., Chen, Y., Feigl, L., Kelly, J., Lucero, E., Mariantoni, M., O’Malley, P. J. J. et al., “Planar superconducting resonators with internal quality factors above one million,” Appl. Phys. Lett. 100, 113510 (2012). View Reference.
Ohya, S., Chiaro, B., Megrant, A., Neill, C., Barends, R., Chen, Y., Kelly, J., Low, D., Mutus, J., O’Malley, P. J. J. et al., “Room temperature deposition of sputtered TiN films for superconducting coplanar waveguide resonators,” Supercond. Sci. Technol. 27, 015009 (2013). View Reference.
Richardson, C. J. K., Siwak, N. P., Hackley, J., Keane, Z. K., Robinson, J. E., Arey, B., Arslan, I., and Palmer, B. S., “Fabrication artifacts and parallel loss channels in metamorphic epitaxial aluminum superconducting resonators,” Supercond. Sci. Technol. 29, 064003 (2016). View Reference.
Sage, J. M., Bolkhovsky, V., Oliver, W. D., Turek, B., and Welander, P. B., “Study of loss in superconducting coplanar waveguide resonators,” J. Appl. Phys. 109, 063915 (2011). View Reference.
Shi, Lili, Tingting Guo, Runfeng Su, Tianyuan Chi, Yifan Sheng, Junliang Jiang, Chunhai Cao, Jingbo Wu, Xuecou Tu, Guozhu Sun, Jian Chen, Peiheng Wu; "Tantalum microwave resonators with ultra-high intrinsic quality factors," Appl. Phys. Lett. 12 , December 2022; 121 (24): 242601. View Reference.
Vissers, M. R., Gao, J., Wisbey, D. S., Hite, D. A., Tsuei, C. C., Corcoles, A. D., Steffen, M., and Pappas, D. P., “Low loss superconducting titanium nitride coplanar waveguide resonators,” Appl. Phys. Lett. 97, 232509 (2010). View Reference.
Vissers, M.R., J. Gao, D. S. Wisbey, D. A. Hite, C. C. Tsuei, A. D. Corcoles, M. Steffen, D. P. Pappas; "Low loss superconducting titanium nitride coplanar waveguide resonators," Appl. Phys. Lett. 6 , December 2010; 97 (23): 232509. View Reference.
Wang, H., Hofheinz, M., Wenner, J., Ansmann, M., Bialczak, R. C., Lenander, M., Lucero, E., Neeley, M., O’Connell, A. D., Sank, D. et al., “Improving the coherence time of superconducting coplanar resonators,” Appl. Phys. Lett. 95, 233508 (2009). View Reference.
Wisbey, D. S., Gao, J., Vissers, M. R., da Silva, F. C. S., Kline, J. S., Vale, L., and Pappas, D. P., “Effect of metal/substrate interfaces on radio-frequency loss in superconducting coplanar waveguides,” J. Appl. Phys. 108, 093918 (2010). View Reference.
Zheng K., D. Kowsari, N. J. Thobaben, X. Du, X. Song, S. Ran, E. A. Henriksen, D. S. Wisbey, K. W. Murch; "Nitrogen plasma passivated niobium resonators for superconducting quantum circuits," Appl. Phys. Lett. 7 , March 2022; 120 (10): 102601. View Reference.
To suggest a reference to be added, please email [email protected].
