Bump versions, move rules into src

[AnHeuermann]

Enable other modules to install tree-sitter-metamodelica as dependency.
The importing package will need a postinstall rule to generate wasm:

  "scripts": {
    "postinstall": "cd node_modules/tree-sitter-metamodelica && npx tree-sitter generate && npx tree-sitter build --wasm --docker ."
  },