diff --git a/python/triton/runtime/cache.py b/python/triton/runtime/cache.py
index 4b87108e0cd4..d5e777ee9a6c 100644
--- a/python/triton/runtime/cache.py
+++ b/python/triton/runtime/cache.py
@@ -120,14 +120,18 @@ def put(self, data, filename, binary=True) -> str:
         rnd_id = str(uuid.uuid4())
         # we use the PID in case a bunch of these around so we can see what PID made it
         pid = os.getpid()
-        # use tempfile to be robust against program interruptions
-        temp_path = f"{filepath}.tmp.pid_{pid}_{rnd_id}"
+        # use temp dir to be robust against program interruptions
+        temp_dir = os.path.join(self.cache_dir, f"tmp.pid_{pid}_{rnd_id}")
+        os.makedirs(temp_dir, exist_ok=True)
+        temp_path = os.path.join(temp_dir, filename)
+
         mode = "wb" if binary else "w"
         with open(temp_path, mode) as f:
             f.write(data)
         # Replace is guaranteed to be atomic on POSIX systems if it succeeds
         # so filepath cannot see a partial write
         os.replace(temp_path, filepath)
+        os.removedirs(temp_dir)
         return filepath