EpitaxialDeposition.jl

Chemical Reactors Term Project

Ian Harreschou and Adrian Henle

Purpose

EpitaxialDeposition.jl is a pure-Julia package for simulating the epitaxial growth of single-crystalline silicon thin films on silicon wafers by a chemical vapor deposition process. The heavy lifting is done by the Catalyst.jl and JFVM.jl packages for chemical kinetics and mass transport, respectively.

Setup

EpitaxialDeposition.jl is not a package on the Julia general registry. To obtain it, clone the repo:

$ git clone https://github.com/eahenle/EpitaxialDeposition.jl

The JFVM.jl dependency is also not registered, and must be obtained from its GitHub repo. To easily set up this and all other dependencies, run:

$ julia setup.jl

Testing

To check that the package is working, do the following in the REPL Pkg mode:

Pkg> activate .
Pkg> test

Disclaimer

This package is a demonstration only. Attempting to use this package as-is for actual chemistry could result in harm to equipment or personnel.